In this thesis, the development of new or improved magnetic and electric field based miniaturized angular position sensors and the associated sensor electronics are presented. The development includes (i) a novel, thin, planar coil-based variable reluctance angular position sensor that is insensitive to the axial misalignment of the shaft, (ii) a new eddy current-based angle sensor that uses the rotating shaft itself as one of the sensing elements, and (iii) a new capacitive sensor that can simultaneously measure both the linear and angular position of the shaft. All the new sensors and associated systems developed are analyzed, optimized, and experimentally validated. Details of the designs and the performance enhancement achieved will be presented in the talk.